English patents
نویسندگان
چکیده
منابع مشابه
Patents or Patents Pending
An Aluminum Nitride (AlN) MEMS resonator technology has been developed, enabling massively parallel filter and oscillator arrays on a single chip. Low loss filter banks and resonator arrays covering the 10MHz10GHz frequency range have been demonstrated, as has monolithic integration with inductors and CMOS circuitry. The high level of integration enables miniature multi-band, spectrally-aware a...
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ژورنال
عنوان ژورنال: Journal of the Franklin Institute
سال: 1829
ISSN: 0016-0032
DOI: 10.1016/s0016-0032(29)90608-6